Tool Access Program

To support the development efforts of the equipment and material supplier industry, ATDF offers the Tool Access Program.

Features include the following:

• Affordable access to state-of-the-art process tools
• Experienced engineers support and process your DOE while you are present to make real-time adjustments
• Availability of extensive leading-edge metrology
• Industry standard wafers for process and test analysis
• Your IP is protected and not shared with SEMATECH member companies

Tool availability

• CMP
• Lithography
• Etch
• Metrology
• Cleans
• Coaters

To participate, or for more information on the Tool Access Program, contact us at wafer.services@atdf.com.